A resonant cantilever mass sensor can quantitatively detect unknown analytes by measuring the frequency shift, which mainly consists of one piezoelectric or piezoresistive layer, one elastic supporting layer, and one functional layer for absorbing analyte on the cantilever surface. This paper focus on the piezo electric effect as the transduction method which focus on harvesting energy using cantilever beam i.e.resonance based energy harvesting. Furthermore, by optimizing both the cross- section shape and the geometrical ratios of the elastic extension to the piezoelectric layer simultaneously, the overall sensitivity can beincreased by 8.15 times greater than that of the rectangular section cantilever sensor, which has great potential applications in high-resolution mass sensor This paper proposes the increased efficiency which can be obtained by incorporating piezo electric sensors with resonant cantilevers.
